A New Environmentally Friendly Chemical Mechanical Polishing Method Applied for Surface Finishing Ti-6Al-4V Alloy
1
Mechanical, Hanoi University of Industry, Viet Nam
Submission date: 2023-05-14
Final revision date: 2023-07-11
Acceptance date: 2023-07-14
Online publication date: 2023-07-22
Publication date: 2023-12-14
Journal of Machine Engineering 2023;23(4):64-76
KEYWORDS
TOPICS
ABSTRACT
A new eco-friendly slurry has been developed for the chemical mechanical polishing process with a solution of malic acid, deionized water, and an oxidizing agent hydrogen peroxide (H2O2). The surface quality of Ti-6Al-4V workpieces with the proposed chemical mechanical polishing slurry with optimal parameters include oxidizers (H2O2), colloidal (SiO2) slurry, and deionized water by weight 8%, 45%, and 47% respectively, the pH concentration is adjusted 4 through the malic acid content present in the slurry. Experimental results obtained with the proposed chemical mechanical polishing method show a more improved surface quality than previous studies when applying for polishing Ti-6Al-4V alloy. The developed chemical mechanical polishing method's polishing results under optimal conditions obtain an ultra-fine surface quality with Ra = 0.696 nm over a measuring area of 53×70 μm2. X-ray photoelectron (XPS) and electrochemical measurements were used to study the chemical reaction mechanisms in the proposed chemical mechanical polishing process. The chemical mechanical polishing processes for the surface of the Ti-6Al-4V alloy workpiece with the H2O2 oxidizing agent showed high suitability with the reactants formed on the surface such as Ti, V, and Al oxide. The established chemical mechanical polishing method shows high applicability in environmental protection and Ti-6Al-4V alloy ultra-precision machining industries.
REFERENCES (30)
1.
TANABE I., GOI Y., TANABE Y., 2020, Research on Oxidation Phenomenon During Titanium Machining and its Prevention, Journal of Machine Engineering, 20/2, 77–85. https://doi.org/10.36897/jme/1....
2.
NGUYEN D., YIN S., TANG Q., SON P.X., DUC L.A., 2019, Online Monitoring of Surface Roughness and Grinding Wheel Wear When Grinding Ti-6Al-4V Titanium Alloy Using ANFIS-GPR Hybrid Algorithm and Taguchi Analysis, Precision Engineering, 55, 275–292, https://doi.org/10.1016/j.prec....
3.
POROS D., WISNIEWSKA M., ZABORSKI S., 2020, Comparative Analysis of WEDM with Different wire Electrodes Applied to Cut Titanium Ti6Al4V, Journal of Machine Engineering, 20/4, 116–125. https://doi.org/10.36897/jme/1....
4.
TIEN D.H., Duy T.N., THOA P.T.T., 2023, Applying GPR-FGRA Hybrid Algorithm for Prediction and Optimization of Eco-Friendly Magnetorheological Finishing Ti–6Al–4V Alloy, International Journal on Interactive Design and Manufacturing (IJIDeM), 17, 729–745, 2023/04/01.
5.
KLIPPEL H., GONZALEZ E., SANCHEZ., ISABEL M., RÖTHLIN M., AFRASIABI M., et al., 2022, Cutting Force Prediction of Ti6Al4V Using a Machine Learning Model of SPH Orthogonal Cutting Process Simulations, Journal of Machine Engineering, 22/1, 111–123, https://doi.org/10.36897/jme/1....
6.
ZHANG M., NG C.-H., DEHGHAN-MANSHADI A., HALL C., BERMINGHAM M.J., M.S. DARGUSCH, 2023, Towards Isotropic Behaviour in Ti–6Al–4V Fabricated with Laser Powder Bed Fusion and Super Transus Hot Isostatic Pressing, Materials Science and Engineering A, 874, 145094, 2023/05/25/.
7.
ESTUPINAN-LOPEZ F., ORQUIZ-MUELA C., GAONA-TIBURCIO C., CABRAL-MIRAMONTES J., BAUTISTA-MARGULIS R.G., NIEVES-MENDOZA D., et al., 2023, Oxidation Kinetics of Ti-6Al-4V Alloys by Conventional and Electron Beam Additive Manufacturing, Materials 16/3, 1187, https://doi.org/10.3390/ma160 31187.
8.
SYED A.K., PARFITT D., WIMPENNY D., MUZANGAZA E., CHEN B., 2022, Cyclic Plasticity and Damage Mechanisms of Ti-6Al-4V Processed by Electron Beam Melting, International Journal of Fatigue, 160, 106883, https://doi.org/10.1016/j.ijfa....
9.
FIAZ H.S., SETTLE C.R., HOSHINO K., 2016, Metal Additive Manufacturing for Microelectromechanical Systems: Titanium Alloy (Ti-6Al-4V)-Based Nanopositioning Flexure Fabricated by Electron Beam Melting, Sensors and Actuators A: Physical, 249, 284–293, https://doi.org/10.1016/j.sna.....
10.
HASSANIN H., MODICA F., EL-SAYED M., LIU J., ESSA K., 2016, Manufacturing of Ti–6Al–4V Micro‐Implantable Parts Using Hybrid Selective Laser Melting and Micro‐Electrical Discharge Machining, Advanced Engineering Materials, 18, https://doi.org/10.1002/adem.2....
11.
DUYTRINH N., SHAOHUI Y., NHAT TAN N., XUAN SON P., DUC L.A., 2019, A New Method for Online Monitoring when Grinding Ti-6Al-4V Alloy, Materials and Manufacturing Processes, 34/1, 39–53, https://doi.org/10.1080/104269....
12.
WU W., HE G., HUANG J., ZHANG A., LIU X., OUYANG Z., et al., 2023, Influence of Electrochemically Charged Hydrogen on Mechanical Properties of Ti–6Al–4V Alloy Additively Manufactured by Laser Powder-Bed Fusion (L-PBF) Process, Materials Science and Engineering: A, 866, 144339, https://doi.org/10.1016/j.msea....
13.
MACE A., GILBERT J.L., 2023, Micro Asperity-Based Fretting Corrosion of Cocrmo, Ti-6Al-4V, and 316L SS: Assessment of an Electrochemical and Micro-Mechanical Model, Tribology International, 180, 108222, https://doi.org/10.1016/j.trib....
14.
TANABE I., ISOBE H., 2023, Development of Mirror-Polishing Process Technology for Difficult-to-Polish Materials, Journal of Machine Engineering, 23/1, 85–99, https://doi.org/10.36897/jme/1....
15.
DUC L.A., HIEU P.M., QUANG N.M., 2023, A New Chemical Mechanical Slurry for Polishing Yttrium Aluminium Garnet Material with Magnesium Oxide, Sodium Metasilicate Pentahydrate and Zirconium Dioxide Abrasive Particles, Journal of Machine Engineering 23/1. 174–185, https://doi.org/10.36897/jme/1....
16.
OKAWA S., WATANABE K., 2009, Chemical Mechanical Polishing of Titanium with Colloidal Silica Containing Hydrogen Peroxide – Mirror Polishing and Surface Properties, Dental Materials Journal, 28/1, 68–74. https://doi:10.4012/dmj.28.68
17.
DUC L.A., HIEU P.M., MAI N.T., TRONG T.V., QUANG N.M., 2022, Analysis of Solid and Ionic Surface Reaction Form to Surface Quality when Using Chemical-Mechanical Slurry Polishing, Journal of Machine Engineering, 22/4, 82–94. https://doi.org/10.36897/jme/1....
18.
HUANG P., LAI J., HAN L., YANG F.-Z., JIANG L.-M., SU J.-J., et al., 2016, Electropolishing of Titanium Alloy Under Hydrodynamic Mode, Science China Chemistry, 59, 1525–1528.
19.
KAUSHIK R.M., BHANDAKKAR A.B., PATRO T.U., 2014, Solution of Emulsifiable oil and Hydrogen Peroxide for Chemical–Mechanical Polishing of Ti alloy–A Green Approach, Materials Letters, 122, 252–255. https://doi.org/10.1016/j.matl....
20.
PEDDETI S., ONG P., LEUNISSEN L., BABU S., 2011, Chemical Mechanical Polishing of Ge Using Colloidal Silica Particles and H2O2, Electrochemical and Solid-State Letters, 14/7, https://doi.org/10.1149/1.3575....
21.
VIJAYAKUMAR A., TODI R., DU T., SUNDARAM K.B., 2006, Chemical Mechanical Polishing of Copper and Tantalum Barrier: Studies on Slurry Chemistry for Optimum Selectivity, Proceedings – Electrochemical Society, 560–571.
22.
WANG J., XU Z., ZHU D., 2023, Improving Profile Accuracy and Surface Quality of Blisk by Electrochemical Machining with a Micro Inter-Electrode Gap, Chinese Journal of Aeronautics, 36/2, 523–537. https://doi.org/10.1016/j.cja.....
23.
XIE W., ZHANG Z., YU S., LI L., CUI X., GU Q., et al., 2023, High Efficiency Chemical Mechanical Polishing for Silicon Wafers Using a Developed Slurry, Surfaces and Interfaces, 38, 102833. https://doi.org/10.1016/j.surf....
24.
YU F., ADDISON O., DAVENPORT A., 2015, A Synergistic Effect of Albumin and H2O2 Accelerates Corrosion of Ti6Al4V, Acta Biomaterialia, 26. https://doi.org/10.1016/j.actb....
25.
DU J., ZHAO G., SHI Y., YANG H., LI Y., ZHU G., et al., 2013, A Facile Method for Synthesis of N-Doped TiO2 Nanooctahedra, Nanoparticles, and Nanospheres and Enhanced Photocatalytic Activity, Applied Surface Science, 273, 278–286. https://doi.org/10.1016/j.apsu....
26.
BHARTI B., KUMAR S., LEE H.-N., KUMAR R., 2016, Formation of Oxygen Vacancies and Ti3+ State in TiO2 Thin Film and Enhanced Optical Properties by Air Plasma Treatment, Scientific Reports, 6, 32355.
27.
CHINH V., BROGGI A., DI PALMA L., SCARSELLA M., SPERANZA G., VILARDI G., et al., 2017, XPS Spectra Analysis of Ti2+, Ti3+ Ions and Dye Photodegradation Evaluation of Titania-Silica Mixed Oxide Nanoparticles, Journal of Electronic Materials, 47/4, 1–10. https://doi.org/10.1007/s11664....
28.
SILVERSMIT G., DEPLA D., POELMAN H., MARIN B., GRYSE R., 2004, Determination of the V2p XPS Binding Energies for Different Vanadium Oxidation States (V5+ to V0+), Journal of Electron Spectroscopy and Related Phenomena, 135/2–3, 167–175. https://doi.org/10.1016/j.elsp....
29.
KOUST S., REINECKE B.N., ADAMSEN K.C., BEINIK I., HANDRUP K., LI Z., et al., 2018, Coverage-Dependent Oxidation and Reduction of Vanadium Supported on Anatase TiO2(1 0 1), Journal of Catalysis, 360, 118–126. https://doi.org/10.1016/j.jcat....
30.
RAKSHIT A., ISLAM K., SULTANA R., CHAKRABORTY S., 2020, Effect of Oxygen Content and Crystallization Temperature on the Insulator-to-Metal Transition Properties of Vanadium Oxide Thin-Films, Vacuum, 180, 109633. https://doi.org/10.1016/j.vacu....
| eISSN: | 2391-8071 |
| ISSN: | 1895-7595 |
We process personal data collected when visiting the website. The function of obtaining information about users and their behavior is carried out by voluntarily entered information in forms and saving cookies in end devices. Data, including cookies, are used to provide services, improve the user experience and to analyze the traffic in accordance with the Privacy policy. Data are also collected and processed by Google Analytics tool (more).
You can change cookies settings in your browser. Restricted use of cookies in the browser configuration may affect some functionalities of the website.
You can change cookies settings in your browser. Restricted use of cookies in the browser configuration may affect some functionalities of the website.
