28.
MAI L., BOYSEN N., SUBASI E., de los ARCOS T., D., GRUNDMEIER G., et al., 2018, Water Assisted Atomic Layer Deposition of Yttrium ROGALLA Oxide Using Tris(N, N′-Diisopropyl-2-Dimethylamido-Guanidinato) Yttrium(Iii): Process Development, Film Characterization and Functional Properties, RSC Advances, 8, 4987–4994.